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Flow Instruments & Assembly Tools

Gas Mass Flow Meters & Controllers

Thermal mass flow meters and controllers with multi-gas capability for gas measurement and dosing.

  • Range10 sccm – 500 slpm
  • GasesApprox. 40 built-in gases and 10 mixtures
  • Accuracy±0.2% FS class (model dependent)

Technical datasheet available on request.

Specifications

Specifications of Gas Mass Flow Meters & Controllers
Range10 sccm – 500 slpm
GasesApprox. 40 built-in gases and 10 mixtures
Accuracy±0.2% FS class (model dependent)
Interfaces0 – 5 V analog; RS-485 Modbus-RTU

Values are reference information compiled from supplier documentation. Final grade, standard, condition and test values are confirmed in the quotation and order documents.

Key selection parameters

  • Gas and full-scale range
  • Inlet / outlet pressure
  • Signal / communication
  • Fittings and wetted materials
  • Accuracy

Typical applications

  • Semiconductor and coating gas lines
  • Laboratory gas blending
  • Fuel-cell and battery test benches

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